工藝用水

工藝用水廣泛應用于微電子、食品飲料、精細化和原子能工業,特別是微電子技術和半導體集成電路產業。超純水有各種測試項目,例如:electrics resistivity test,TOC,particle test, Sio2 test and colonial test.超純水在微電子行業也變得越來越重要。

 

工藝用水過濾系統流程圖 

 

① Pre-RO Filtration——保安過濾

Function: are typically used to protect membrane systems from premature fouling and short life and reduce system cost. 5um/10um is commonly used.

 

Item Flow Rate Part Number
Option A
≥100m³/h
Option B
<100m³/h
GUF(聚丙烯深層濾芯)

 

② Resin Fine Filtration——樹脂精細過濾

Function: Installed after ions or resin exchange,trap resin fine, avoid of secondary pollution.
Cobetter prodcuts have high filtration efficiency, no ions dissolution, provide high quality water.

 

Item Description Part Number
Option A
Partical control strictly
APS 
(聚醚砜除菌濾芯)0.65/0.45um
Option B
Economical
EPP 3um

 

③ Final Sterile Filtration——終端除菌過濾

Function: Installed on final Filter housing, to remove particles and organisms and protect water quality.
0.22um APSmembrane filter cartridge is commonly used, but if you have strict requirement of particle control,
you can choose APS 0.1um o 0.05um.

■ APS filter cartridge

 

④ Vent Filtration——氣體消毒過濾

Application is for sterilize the air or gas. Inside housing gas is separated from outside,
and go through the housing to outside. So the outside organisms and particles can not go inside.
0.01um Hydrophobic PTFE filter is commonly used.

■ GPF filter cartridge

 

如需更多資料,請聯系科百特銷售部:0571-87704266 / sales@cobetterfilter.com

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